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Optical profiler measures surface topography in 3-D
- June 23, 2015
- Product Release
- Testing and Measuring
Zygo Corp. has introduced the ZeGage™ Plus optical profiler for the 3-D measurement of surface topography and roughness.
It uses the company’s proprietary Mx™ software for enhanced data visualization and quantification of step heights, texture, and volumetric applications. The software for data acquisition and analysis provides added capabilities for regions analysis and advanced patterns. Profilers with optional automated XY sample stages also can combine overlapping measurements for the characterization of larger areas.
The user selects the desired magnification and field of view without affecting height precision. Many of the manufacturer’s parfocal objectives can be used with the profiler, from 1.4X to 50X, as well as 1X to 10X long working distance and a 5X super-long working distance lens.
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